Jörg Bollmann Research Laboratory

Scanning Electron Microscope

scanning electron microscopeZEISS SUPRA VP55

Resolution   
1.0nm @ 15 kV, 1.7nm @ 1 kV, 3.5nm @ 0.2kV
2.0nm @ 30 kV (VP mode)

VP Vacuum   
2 – 133 Pa, adjustable in steps of 1 Pa

Magnification   
12 – 900,000x

Emitter   
Schottky emitter, Thermal field emission type

Acceleration Voltage   
0.1 – 30 kV

Probe Current   
4 pA – 20 nA

Detectors   
In-lens SE detector
Everhart-Thornley Secondary Electron Detector
VPSE Detector
AsB Detector
STEM Detector

Chamber   
330 mm (Ø) x 270 mm (h)
CCD-camera with IR illumination

5-Axes Motorised Cartesian Specimen Stage   
X = 130 mm
Y = 130 mm
Z = 50 mm
T = -3 – 70°
R = 360° (continuous)

Peltier Cooling Stage
-30° to 50°C

Image Processing   
Resolution: Up to 3072 x 2304 pixel
Scandium image processing software
Fish eye mode

INCA EnergySEM 350 Energy Dispersive X-ray Microanalysis system
INCAx-act SDD detector: Analytical silicon drift detector
133eV or better guaranteed (nominally 10mm2) with SATW (Super Atmospheric Thin Window) for detection of B-Pu. Liquid N free
X-Stream X-ray acquisition system and detector control